Method of making LiNbO.sub.3 channel optical guides
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United States of America Patent
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Oct 18, 1994
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May 11, 1992
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May 10, 1991
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Abstract
A manufacturing process for high performance single mode channel optical guides of the LiNbO.sub.3 using five successive steps: photo-etched optical path definition, deposition of the dielectric layer, lift-off definition of the channels, proton exchange and thermal cycling. The method can be used to produce multi-function devices to be interfaced with optical fibers to obtain sensors, telecommunications devices and devices for processing wide-band microwave signals the proton exchange is affected in benzoic acid diluted with lithium benzoate and eliminates the time instability of the electro-optical structure due to the presence of an insulating layer above the optical guide.
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