Mounting system for optical annulus in lens assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5353166
SERIAL NO

07957524

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An optical mounting system using interconnected annuli that support optical elements is made more accurate by forming raised engagement surfaces around the periphery of the annuli to confront and engage each other in a mounting plane perpendicular to the concentric axis of the annuli. The raised engagement surfaces are preferably formed as concentric ridge rings spaced radially inside and outside a row of screw holes used for interconnecting the annuli. The raised engagement surfaces are also preferably continuous around the peripheries of the annuli so they can be ground accurately flat and provide interannuli mounting surfaces that are resistant to deformation.

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Patent Owner(s)

Patent OwnerAddress
ULTRATECH STEPPER EAST INC7 STATTUCK ROAD ANDOVER MA 01801
ULTRATECH STEPPER INC3230 SCOTT BOULEVARD SANTA CLARA CA 95052-8103

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hanford, Keith E Macedon, NY 8 163
Johnson, Edward A Churchville, NY 23 540

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