Method for manufacturing a rotary anode for X-ray tube
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United States of America Patent
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Oct 4, 1994
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N/A
app pub date -
Aug 10, 1993
filing date -
May 17, 1991
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Abstract
A method for manufacturing a rotary anode for use in an X-ray tube is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.
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