Method for fabricating ink jet printhead
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United States of America Patent
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Oct 4, 1994
Issued Date -
N/A
app pub date -
Nov 3, 1993
filing date -
Oct 4, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An adhesive layer 15 is formed over one major surface of a flat base plate 1 having a relatively high rigidity, a piezoelectric plate 2 is joined to the adhesive layer 15, a plurality of parallel grooves 3 are formed through the piezoelectric plate 2 into the adhesive layer 15, a metal is deposited over the surfaces of the grooves 3 to form electrodes 8, a top plate 10 is attached to the upper surface of the piezoelectric plate 2 so as to close the upper open ends of the grooves 3, and a nozzle plate 12 provided with a plurality of ink jets is attached to one end of the assembly of the base plate 1, the adhesive layer 15, the piezoelectric plate 2 and the top plate 10 so as to close the open longitudinal ends of the grooves 3 to form a plurality of pressure chambers 14. The upper side walls 4a of side walls 4 separating pressure chambers 14 from each other are formed of portions of the piezoelectric plate 2 and the lower side walls 4b of the side walls 4 are formed of portions of the adhesive layer 15 having a rigidity lower than that of the piezoelectric plate 2. Accordingly, the side walls 4 can be strained greatly. The electrodes 8 formed by electroless plating have few pinholes.
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