VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication
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United States of America Patent
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Sep 27, 1994
Grant Date -
N/A
app pub date -
Mar 8, 1993
filing date -
Mar 8, 1993
priority date (Note) -
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Abstract
A VCSEL including a first mirror stack, an active region and a second mirror stack positioned on a substrate with portions of the active region and the first and second mirror stacks being offset from surrounding portions by an offset area in the surface of the substrate so as to define a lateral waveguide which confines the operating region of the VCSEL. The surrounding portions of the second mirror stack are removed to provide current control and refractory metal contacts are formed on the upper and lower surfaces. Methods of fabricating the offset as a depression or a mesa in the surface of the substrate and the resulting VCSEL are disclosed.
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