Turbomolecular pump having vanes with ceramic and metallic surfaces
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 27, 1994
Grant Date -
N/A
app pub date -
Jun 3, 1993
filing date -
Jun 5, 1992
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A turbomolecular pump comprises a casing having an inlet port at one end portion and an outlet port at another end portion, a rotor supported rotatably within the casing, and a stator fixed on an inner wall of the casing. The rotor has rotor vanes which coact with stator vanes on the stator to pump gas molecules from the inlet port to the outlet port. The rotor and stator vanes are arranged in multi-steps and have ceramic surfaces at the steps near the outlet port of the casing and have metallic surface at all other steps, so as to promote the baking efficiency and obtain extremely high vacuums.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully