Method and apparatus for displaying process endpoint signal based on emission concentration within a processing chamber
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United States of America Patent
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Aug 30, 1994
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N/A
app pub date -
Jun 9, 1992
filing date -
Jan 16, 1990
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Abstract
A method displays a signal which represents the variation of light intensity in a processing chamber over time. The light intensity within the process chamber is detected to produce a voltage signal with a voltage amplitude which varies based on the light intensity within the process chamber. The voltage amplitude of the voltage signal is digitally sampled at a sampling interval to obtain sample values. Running averages of a preselected number of sample values are calculated and displayed on a graph. For each newly displayed running average, a rectangular box may be superimposed over the graph of the running averages in order to graphically display changes in slope. A computer is programmed to look for an anticipated sequence of slopes.
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