Methods and apparatus for cleaning objects
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United States of America Patent
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-
Aug 23, 1994
Grant Date -
N/A
app pub date -
Dec 18, 1992
filing date -
Dec 18, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Cleaning methods and apparatus for removing particulate materials from the surfaces of objects are disclosed. Megasonic vibrations are utilized to cause a liquid cleaning fluid in a first reservoir to rise above the upper end of the first reservoir, contact the surface of the object to be cleaned and flow over a weir at the upper end of the first reservoir into a second reservoir. The methods and apparatus are useful to remove small particles, e.g. having a particle size of less than about 1 micron, from flat or curved planar surfaces. The methods and apparatus can be integrated with subsequent processing steps, e.g. applying thin film coatings, without intermediate handling of the objects.
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