Optical illumination and inspection system for wafer and solar cell defects
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 2, 1994
Grant Date -
N/A
app pub date -
Apr 5, 1993
filing date -
Apr 5, 1993
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An optical inspection system for detecting cracks in a crystalline substrate. The crystalline substrate that is to be inspected is located in a test plane in the field of view of a video camera. A first collimated light source projects light which is passed through a long pass filter. The filtered collimated light is projected onto the reflective surface of a panel that contains surface irregularities in the same order as the wavelength of the filtered, collimated light. The light is diffused by the panel surface and reflected onto the crystalline substrate at a plurality of various angles. The light passes through the crystalline substrate and is reflected into the path of the field of view of the video camera and forms an object image from which a real image is created and may be viewed on a control monitor. Cracks in the solar cell silicon layer or glass covers can be observed on the control monitor, and printed by a video graphics printer or stored via a VCR for permanent documentation purposes.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully