Oxidation/diffusion processing apparatus
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United States of America Patent
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Jul 19, 1994
Grant Date -
N/A
app pub date -
Jan 29, 1993
filing date -
Jan 31, 1992
priority date (Note) -
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Abstract
An oxidation/diffusion processing apparatus includes a processing vessel, arranged such that a longitudinal direction is vertical, for storing a plurality of target objects to be processed, a heater arranged around the processing vessel, for heating the interior of the processing vessel, a process gas supply mechanism for supplying a process gas from the lower portion of the processing vessel into the processing vessel, and an exhaust mechanism for exhausting a processed exhaust gas from the upper portion of the processing vessel. The process gas is supplied to the target objects heated to a predetermined temperature by the heater to perform oxidation/diffusion processing to the target objects.
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