Substrate holding and rotating arrangement for vacuum processes
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United States of America Patent
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Jul 5, 1994
Grant Date -
N/A
app pub date -
Dec 10, 1992
filing date -
Dec 19, 1991
priority date (Note) -
Expired
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Abstract
In order to dispose substrates, such as lenses, having different sizes in a working installation, a holding arrangement comprises a spring clasp (3) provided for the clamping holding of the substrates or lenses, which spring clasp is suitable for disposition in a holding device (9) of the arrangement.
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