Micromechanical actuator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5322258
SERIAL NO

07634154

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micromechanical actuator is suggested, the movable part of which, such as the diaphragm, the bending bar or a similar device, can be moved relative to a stationary part by a combination of electromagnetic and electrostatic forces. The manufacturing techniques and the applications of the actuator are described. The construction is very compact, that is, highly integrated.

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Patent Owner(s)

Patent OwnerAddress
MESSERSCHMITT-BOLKOW-BLOHM GMBHMUNICH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bosch, Dieter Munchen, DE 3 189
Muck, Gunter Holzkirchen, DE 1 129
Seidel, Helmut Starnbert, DE 20 627

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Patent Citation Ranking

  • 129 Citation Count
  • F16K Class
  • 99.86 % this patent is cited more than
  • 31 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1846716238137531101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 7071 - 8091 - 1000255075100125150175200225250275300325350375400425450475500

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