Scanning force microscope

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United States of America Patent

PATENT NO 5319960
SERIAL NO

07847160

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The scanning force microscope is an improved free standing type scanning force microscope with integrated scanning drivers for examination of a wide range of sizes and weights of stationary specimens, with the capability of scanning a sample in contact with a fluid. The scanning force microscope also includes motorized driver legs for operating the approach of the optical lever arm and sensor head to the sample, to allow for automation of the approach of the sensor head to the specimen.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY LLC100 SUNNYSIDE BLVD WOODBURY NY 11797

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gamble, Ronald C Altadena, CA 35 1759
West, Paul E Cupertino, CA 18 595

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