Heat treating apparatus
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United States of America Patent
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Jun 7, 1994
Grant Date -
N/A
app pub date -
Mar 6, 1992
filing date -
Mar 7, 1991
priority date (Note) -
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Abstract
A heat treating apparatus comprises a reaction tube for receiving a plurality of articles to be treated and a heating unit surrounding at least part of the reaction tube. The reaction tube comprises a first structural section, at least part of which is surrounded by the heating unit and a second structural section, at least part of which extends from the heating unit. The first structural section is made of material having thermal resistivity and thermal conductivity higher than the second structural section.
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