Method for producing high quality thin layer films on substrates
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United States of America Patent
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Apr 26, 1994
Grant Date -
N/A
app pub date -
Nov 23, 1992
filing date -
Nov 23, 1992
priority date (Note) -
Expired
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Abstract
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
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