Thin disk force sensor and method of making
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United States of America Patent
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Mar 29, 1994
Grant Date -
N/A
app pub date -
May 31, 1991
filing date -
May 31, 1990
priority date (Note) -
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Abstract
A thin disk force sensor having measuring elements of not more than five layers including force introducing layers welded under preloading to a thin disk housing. The measuring elements, weld and disk housing are planarized. A vapor deposited layer is selectively applied to the force measuring elements to increase the applied force compared to the housing.
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