Method and apparatus for eliminating electric charges in a clean room

United States of America Patent

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Mar 22, 1994
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app pub date
Sep 18, 1992
filing date
Nov 28, 1990

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Abstract

A method and apparatus for eliminating electric charges in a clean room is disclosed involving removing fine and superfine grains from air in the clean room, and generating ions in the thus purified air inside the room.

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Patent Owner(s)

Patent Owner	Address
TECHNO RYOWA CO LTD	TOKYO

International Classification(s)

B03C:MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Suzuki, Masanori	Tokyo, JP	203	2878

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Method and apparatus for eliminating electric charges in a clean room

Number of patents in Portfolio can not be more than 2000

United States of America Patent

07946820

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PATENT NO	5296018
SERIAL NO	07946820
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07946820

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