Conveyor for conveying workpieces in a vacuum chamber
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United States of America Patent
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-
Feb 8, 1994
Grant Date -
N/A
app pub date -
Mar 16, 1992
filing date -
Mar 18, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A conveyor for conveying a workpiece in a vacuum chamber includes a floating body having a conveying rod, a pair of magnetic bearing portions disposed in a moving direction of the floating body and supporting the floating body solely by magnetic forces, and a non-contact driving motor portion for directly reciprocating the floating body. The floating body is directly reciprocated by a linear pulse motor. The linear pulse motor comprises a motor main body and a cog portion, and the motor main body is interposed between a pair of magnetic bearing portions. The cog portion is disposed in a longitudinal or axial direction of the outer peripheral surface of the floating body and coacts with the motor main body to reciprocate the floating body.
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