Secondary-ion mass spectrometry apparatus using field limiting method
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United States of America Patent
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Jan 11, 1994
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N/A
app pub date -
Apr 24, 1992
filing date -
Apr 25, 1991
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Expired
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Abstract
A secondary-ion mass spectrometry apparatus using a field limiting method includes an optical system for primary ions, a sample chamber, and an optical system for secondary ions, and a total ion monitor (TIM) interposed between an electric sector and a magnetic sector of the optical system for secondary ions. A field-limited image (or TIM image) from the TIM can be observed or monitored continually by a CRT, thereby making it possible to grasp quantitatively the charging state of a sample surface. The apparatus may further include an adjuster for adjusting quantatively the charging state of the sample surface.
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