Resist oxidizer with catalytic reactor
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United States of America Patent
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-
Dec 28, 1993
Grant Date -
N/A
app pub date -
May 14, 1992
filing date -
May 14, 1992
priority date (Note) -
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Abstract
A catalytic reactor is used in the exhaust tract of a high pressure, high flow rate ozone asher to prevent resist deposit fouling of the exhaust tract.
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