Liquid vaporizer-feeder
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United States of America Patent
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Dec 28, 1993
Grant Date -
N/A
app pub date -
Jan 16, 1992
filing date -
Feb 5, 1991
priority date (Note) -
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status (Latency Note)
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Abstract
A liquid vaporizer-feeder has a unitary housing structure for both a control valve for controlling the amount of a liquid passing therethrough and a vaporization valve for causing the liquid from the control valve to be vaporized and transported out by a carrier gas. The housing structure has a throughhole through which the two valves are connected. The throughhole is short and narrow, and has a portion made even narrower such that the pressure in the liquid passing therethrough is increased, preventing bubbles from forming in the throughhole. As a result, vaporized liquid can be supplied at a steadier rate, for example, to a reaction chamber.
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