Robotic substrate manipulator
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United States of America Patent
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-
Dec 21, 1993
Grant Date -
N/A
app pub date -
Feb 3, 1992
filing date -
Feb 3, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A robotic substrate manipulator constructed for substrate handling during thin film deposition in the vacuum of outer space. The robotic substrate manipulator includes a cassette holding a plurality of substrates preferably including six cassettes in a carousel. A circular cylinder encloses the carousel with an access door at a location accessible by a manipulator arm assembly. Substrates are retained within the cassette via a passive retention system. This manipulator arm assembly includes an arm with a gripper at one end. The gripper includes a pair of opposed fingers normally urged closed by at least one finger spring that may be opened by a solenoid. The manipulator arm assembly includes a vertical driver and a horizontal rotary driver permitting motion of substrates from the cassette to a processing station. Position gauges on both the vertical motion driver and the horizontal rotary motion driver permit feedback regarding the manipulator arm assembly position. In the preferred embodiment the processing station employs the vacuum of space in thin film deposition.
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