Sputtering target assembly for a sputter coating apparatus
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United States of America Patent
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-
Dec 14, 1993
Grant Date -
N/A
app pub date -
Jun 15, 1992
filing date -
Jun 15, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sputtering target assembly for a sputter coating apparatus includes a spacing ring which is threaded to a target holder and a target which attaches to the spacing ring at one side and fits into the target holder at another side. The target holder fits into a cathode body which functions as a magnetic pole piece, a portion of a cooling system, and a mechanical stabilizer for the target. The target holder also provides cooling, using cooling passages and the spacing means which is threaded to the target holder. The sputtering target has an arch-like face which promotes a controlled plastic deformation in a preselected direction, so that heating expansion during operation results in the target being urged into forceful and close contact with at least two cooled surfaces.
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