Composite aluminum plate for physical coating processes and methods for producing composite aluminum plate and target
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United States of America Patent
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Dec 7, 1993
Issued Date -
N/A
app pub date -
Jun 21, 1991
filing date -
Nov 25, 1988
priority date (Note) -
Expired
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Abstract
A composite aluminum plate suitable for making targets for coating processes, and methods for making them are disclosed. The plate comprises a surface layer of pure aluminum or an alloy of pure aluminum, and a supporting layer made of a hardenable aluminum alloy having a Brinell hardness index HB of at least about 50 after being heat-treated under suitable conditions. The targets made are suitable for physical or sputter coating processes such as cathodic sputtering and magnetron sputtering.
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