Multilayer solid lubricant composite structures and method of making same
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United States of America Patent
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Dec 7, 1993
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app pub date -
Mar 7, 1991
filing date -
Dec 21, 1990
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Abstract
A composite, multilayer thin film solid lubricant structure having multiple thin film layers of solid lubricant interleaved by thin film interlayers which interrupt propagation of growth defects in the deposition process.
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