Carrier device
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United States of America Patent
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-
Dec 7, 1993
Grant Date -
N/A
app pub date -
Jun 26, 1991
filing date -
Jul 13, 1990
priority date (Note) -
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status (Latency Note)
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Abstract
The present invention provides a carrier which enables rapid, accurate positioning of work, while providing registration of the subsequent work piece. The carrier becomes at least a part of a processing table and includes sliding suction plates for holding and moving the work pieces between a registration station for positioning the work piece on a registration table and a processing station for processing the work piece while in a airtight chamber on the processing table. The carrier is characterized by a sealing mechanism for sealing the gap between the remaining sections of the processing table and the sliding suction plates when the sliding suction plates are located in the processing station. As a result, the airtight operation in the processing station is possible, and the carriage moves only the sliding suction plates. The carriage moves the work piece between the registration station and the processing station at a high speed.
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