Serial evaporator for vacuum vapor depositing apparatus
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United States of America Patent
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Nov 23, 1993
Grant Date -
N/A
app pub date -
Sep 24, 1991
filing date -
Jul 15, 1991
priority date (Note) -
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Abstract
In a row evaporator for vacuum vapor depositing apparatus, having a plurality of conductively heated evaporator cells (5, 5', . . . ) disposed in the process chamber (11) and individually controllable in output, and connected to jaw-like electrical contacts (3, 3', . . . ; 4, 4', . . . ), the jaw-like contacts are held by an electrically conductive supporting body (6) extending over the entire length of the row evaporator, while the contacts (3, 3', . . . ) of the one polarity are electrically connected to the supporting body (6), and the contacts (4, 4', . . . ) of the other polarity are subject to the action of a plunger (9, 9', . . . ) which is configured as a cylindrical bolt and is brought outwardly through the wall (10) of the process chamber so as to be vacuum-tight yet longitudinally displaceable, so that the cross-sectional area of this plunger (9, 9', . . . ) remains exposed to atmospheric pressure during the operation of the apparatus, and then presses the contacts or jaws (4, 4', . . . ) against their individual evaporator cells (5, 5', . . . ) with sufficiently measured force.
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