Apparatus for transferring disks between a cassette and a pallet
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United States of America Patent
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-
Nov 9, 1993
Grant Date -
N/A
app pub date -
Dec 30, 1991
filing date -
Dec 30, 1991
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for transferring disks with central holes such as wafers includes two transversely notched horizontal rods which are supported parallel to each other and one above the other. The lower rod is adapted to be passed through the center holes of the disks and to support them in its notches by their inner peripheries. The upper rod serves to securely hold these disks from above by their outer rims. A driving unit is provided to individually move the two rods longitudinally and also to vary the separation between them. The apparatus, as a whole, can be moved robotically in all directions. With the apparatus thus structured, the disks can be transferred sequentially between a cassette of an ordinary type for holding them vertically and parallel to one another at a uniform pitch with their central holes aligned and a pallet having a vertical surface with openings each capable of supporting a disk with its both surfaces exposed for processing.
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