Rotary anode for X-ray tube and method for manufacturing the same
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United States of America Patent
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Nov 2, 1993
Grant Date -
N/A
app pub date -
May 13, 1992
filing date -
May 17, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A rotary anode for use in an X-ray tube has a graphite substrate plate, an intermediate layer made of a metal that does not react with graphite, and an X-ray generating layer provided on the intermediate layer for generating X-rays when electron impact is applied. The intermediate layer is a rhenium film having an equiaxed grain structure. A method for manufacturing such a rotary anode is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.
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