Cooled plasma source
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United States of America Patent
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Oct 26, 1993
Grant Date -
N/A
app pub date -
Feb 10, 1992
filing date -
Feb 10, 1992
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Expired
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Abstract
A cooled plasma source for producing ions by electrical discharge. A cooled plate is positioned in the chamber of the plasma source for blocking thermal radiation from an electron-emitting cathode. The presence of the cooled plate results in significantly decreased substrate temperatures, as compared to use of conventional plasma source apparatus. As a result, the cooled plasma source may be used for treatment of heat-sensitive plastic substrates.
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