Capacitive acceleration sensor with free diaphragm
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United States of America Patent
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Oct 19, 1993
Grant Date -
N/A
app pub date -
May 22, 1991
filing date -
May 30, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The acceleration sensor has a first stationary substrate having a stationary electrode and a second stationary substrate having another stationary electrode and being opposed to the first stationary substrate with a given spacing. An electrically conductive diaphragm is disposed in the spacing and has a central segment fixed in the spacing through the pair of stationary substrates and a peripheral segment surrounding around and extending resiliently from the central segment to undergo displacement in the spacing relative to the stationary electrodes in response to an external acceleration force. The peripheral segment and the opposed stationary electrodes form variable capacitors effective to produce a capacitance change in response to the displacement of the peripheral segment to detect the external acceleration force.
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