Discharge exciting excimer laser device
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United States of America Patent
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Oct 5, 1993
Grant Date -
N/A
app pub date -
Nov 4, 1991
filing date -
Mar 5, 1990
priority date (Note) -
Expired
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Abstract
A discharge exciting excimer laser device comprises a pair of main discharge electrodes, a dielectric and an auxiliary electrode. The dielectric is in a cylindrical form and has a side opposed to one of the main discharge electrodes, which side is formed into a flat plate-like portion. The auxiliary electrode is embraced within the dielectric leaving a space and is opposed to one of the main discharge electrodes with the flat plate-like portion of the dielectric sandwiched therebetween. Such a construction increases laser output and improves insulating performance.
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