Electrodes and their lead structures of an ultrathin piezoelectric resonator
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United States of America Patent
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Aug 10, 1993
Grant Date -
N/A
app pub date -
Jan 24, 1992
filing date -
May 25, 1990
priority date (Note) -
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Abstract
In an ultrathin piezoelectric resonator including an ultrathin vibratory portion and thick frame-like marginal portion formed integrally therewith for supporting it around, an electrode and an electrode lead pattern extending therefrom are provided on one surface of the vibratory portion and an electrode is provided on the other surface of the vibratory portion in an area except at least an area corresponding to the electrode lead pattern, thereby preventing that a capacitor is formed between the electrode and the electrode pattern deposited on the opposite surfaces of the vibratory portion and increases the parallel capacitance of the resonator. The electrode lead pattern is formed narrow to reduce an ohmic loss and suppress a spurious resonance. A through hole is made in the frame-like marginal portion and extends therethrough in its thickwise direction. By electrically connecting via the through hole an electrode lead portion on one surface of the frame-like marginal portion and a terminal pad on the other surface thereof, it is possible to ensure good conduction between a conductive film on the bottom of a resonator package and the electrode on the said other surface of the vibratory portion on the side where a cavity is provided.
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