Polylactide compounds as sensitivity enhancers for radiation sensitive mixtures containing o-quinonediazide photoactive compounds

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United States of America Patent

PATENT NO 5234789
SERIAL NO

07854101

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Abstract

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A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one polylactide compound; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.

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Patent Owner(s)

Patent OwnerAddress
OCG MICROELECTRONIC MATERIALS INC A CORPORATION OF DELAWARENot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Favier, Jr James G Morristown, NJ 1 6
Ferreira, Lawrence Fall River, MA 17 219
McFarland, Jr John A Scottsdale, AZ 1 6

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