Stepped mold inserts, a process for the manufacture of stepped mold inserts, and stepped microstructural bodies with the mold inserts
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United States of America Patent
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Aug 10, 1993
Grant Date -
N/A
app pub date -
Nov 24, 1992
filing date -
Dec 19, 1991
priority date (Note) -
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Abstract
A process to manufacture stepped mold inserts and stepped microstructural bodies molded with the mold inserts. Stepped mold inserts are manufactured using structured irradiation masks with regionally different absorption for x-radiation; to this end, extensive calculations are necessary. Furthermore, several masks can be used in succession and for each irradiation step the penetration depth of the x-radiation can be changed. These masks must be positioned with high precision. With the present process stepped mold inserts are manufactured by a simple procedure. Several layers of varying thickness are applied on a metal plate alternating with non-conductive and conductive material. The layered stack is prestructured by precision mechanical machining at depths that vary from region to region, filled with a resist material and irradiated preferably through a single structured mask. Following the 'development' of the resist layer, metal is electrodeposited in the microstructure and the metallic mold insert is separated from the resist structure.
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