Plasma generating apparatus employing capacitive shielding and process for using such apparatus
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United States of America Patent
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Aug 10, 1993
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app pub date -
Oct 10, 1991
filing date -
Oct 10, 1991
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Abstract
A plasma generating apparatus includes a plasma containing region and an R.F. coil for generating R.F. electric fields within the plasma region for creating a plasma from a gas flowed through the region. A capacitive shield is disposed between the coil and the plasma region for limiting the amount of capacitive coupling while not completely eliminating it, between the R.F. coil and the plasma region. The shield can include a means for varying the shielding effect thereof during processes employing the plasma.
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