Jumping probe microscope

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 5229606
SERIAL NO

07361545

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microscope of the scanning probe variety. This device circumvents one of the serious problems of prior art scanning probe microscopes, i.e. that the probe is always near or on the surface of the object being scanned, creating the danger of damaging the probe on the surface especially on large scans or at high scan speeds. The microscope of this invention jumps the probe over the surface, causing the probe to be near or on the surface during only a very limited portion of the scan and therefore able to scan quickly over rough surfaces without undue damage to the probe or surface. Both scanning tunneling microscopes and atomic force microscopes employing the invention are disclosed. The scanning tunneling microscope is shown with both digital and analog control of the movement of the probe.

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Patent Owner(s)

Patent OwnerAddress
VEECO METROLOGY INC112 ROBIN HILL ROAD SANTA BARBARA CA 93117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Elings, Virgil B Santa Barbara, CA 54 2876
Gurley, John A Santa Barbara, CA 28 1442

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