Cluster tool dry cleaning system
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United States of America Patent
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Jul 20, 1993
Grant Date -
N/A
app pub date -
Jan 15, 1992
filing date -
Jan 15, 1992
priority date (Note) -
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Abstract
A cluster tool module for dry process cleaning of substrates. A substrate process reactor body assembly includes a gas inlet and gas outlet on opposing sides of a ceramic reactor body. A linear xenon flash lamp in a light bar provides a UV source for uniform distribution over a substrate by use of a light filter. Infrared heating is also provided by a plurality of infrared lamps in the light box. A moisturizer is provided for safe introduction of water vapor into the gas flow.
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