Selected photoactive methylolated cyclohexanol compounds and their use in forming positive resist image patterns
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United States of America Patent
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Jul 6, 1993
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N/A
app pub date -
Jun 29, 1992
filing date -
Jul 2, 1990
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Abstract
A photoactive compound having formula (I): ##STR1## wherein R is selected from the group consisting of hydrogen or a lower alkyl group having 1-4 carbon atoms and each D is individually selected from the group consisting of a hydrogen or photoactive o-quinonediazide sulfonyl group; subject to the proviso that at least two of the four D's in formula (I) are photoactive o-naphthoquinonediazide sulfonyl moieties.
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