Vacuum pump
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jun 15, 1993
Issued Date -
N/A
app pub date -
Oct 1, 1991
filing date -
Jul 13, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vacuum pump includes a casing provided with an inlet port and an outlet port; a turbo molecular pump unit disposed in an uppermost section, with respect to a flow direction of the gas, of the casing; a peripheral groove vacuum pump unit disposed in a middle section of the casing; and a vortex vacuum pump unit disposed in a lowermost section, with respect to the flow direction of the gas, of the casing.
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