Structure for a resonator using an ultrathin piezoelectric substrate
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United States of America Patent
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Jun 8, 1993
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N/A
app pub date -
Oct 7, 1991
filing date -
Feb 9, 1990
priority date (Note) -
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Abstract
In a resonator which has an ultrathin vibratory portion formed integrally with a thick frame-like rib surrounding it, a pair of opposed thick marginal portions of the frame-like rib are formed so that their widths gradually decreases toward another marginal portion of the rib from the other remaining one perpendicular to the above-noted pair of opposed marginal portions and to be fixed to a resonator case. This structure substantially increases the mechanical strength of the piezoelectric resonator, even if it is held in a cantilever fashion, and protects it from breakage by an external vibration or shock.
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