Contactless guided positioning table
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United States of America Patent
Stats
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Jun 1, 1993
Grant Date -
N/A
app pub date -
Jul 13, 1990
filing date -
Jul 13, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A contactless guided positioning table has a table body and a movable mount having five-axis control magnetic bearings for supporting the table body movably in a horizontal direction. A contactless linear motor horizontally drives the table body. A vacuum container contains the movable mount movably in a direction vertical to the moving direction of the table body. A coupling member is disposed through a flexible hollow member to secure a vacuum state of the vacuum container and couples the movable mount to an external driver. A controller controls the electric current applied to the magnetic bearings. There is no mechanical contact, such as a sliding guide face and ball screw motor, used in the movement of the table body, thereby preventing dust from being generated by friction due to direct contact. Further, the table does not require lubricating oil which would disadvantageously affect normal operation in a vacuum and effectively avoids deposition and removal of solids.
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