Device for distributing a microwave energy for exciting a plasma
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United States of America Patent
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Jun 1, 1993
Grant Date -
N/A
app pub date -
Jan 22, 1992
filing date -
Jan 22, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A device for distributing microwave energy in order to excite a plasma inside an enclosure includes one or more applicators. Each applicator is placed inside the inter-magnet zone and extends in distant relationship to the confinement surface and to the enclosure wall, while being positioned outside the surface having a constant magnetic field and an intensity corresponding to the electronic cyclotron resonance, so as to ensure the confinement and propagation of the microwave energy between the wall and the applicator, outside of the surface.
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