Semiconductor metal composite field emission cathodes
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United States of America Patent
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May 18, 1993
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N/A
app pub date -
Jul 11, 1991
filing date -
Jul 11, 1991
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Expired
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Abstract
A field emission cathode having a parallel array of individual electrically conductive rods of metal silicide or germanide in a silicon-based or germanium-based single crystal matrix. Each rod has an emission end exposed at one major surface of the cathode and an ohmic contact end exposed at an opposite major surface. In a preferred cathode, the matrix and rod materials are the constituents of a eutectic composition. The cathode is fabricated by a process involving producing a composite boule from a eutectic composition of a silicon-based or germanium-based material and a metal. The composite cathode body is cut from the boule so that the rods are generally normal to the major surfaces. Etching may be used to expose a uniform length of the rods at the emitting surface.
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