Arrangement for flooding high speed vacuum pumps
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United States of America Patent
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May 11, 1993
Grant Date -
N/A
app pub date -
Jul 11, 1991
filing date -
Jul 16, 1990
priority date (Note) -
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Abstract
The invention describes an arrangement for optimum flooding of high speed vacuum pumps. The actuation of the flood valve (6) is controlled by the forces, which, among other things, are exerted upon the rotor by the flooding process. These forces are determined and used to actuate a flood valve controlling entry of the flooding gas. Such forces can be measured in active magnetically supported rotors by masuring the currents in the magnetic bearings (10 and 12). In case of hybrid bearing systems and purely mechanical bearing systems, force measurement is possible indirectly by means of measuring the distance or spacing between the rotor and the stator, or, alternatively, also by means of force sensors.
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