Silicon single crystal pulling-up apparatus
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United States of America Patent
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May 4, 1993
Issued Date -
N/A
app pub date -
Apr 22, 1991
filing date -
Dec 26, 1986
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A silicon single crystal pulling-up apparatus includes a silica glass crucible for accommodating a melted silicon material, a cylindrical member made of a carbon composite material which is composed of a carbon fiber wound round a cylinder, impregnated with a resin and carbonized, disposed on an upper end of a cylindrical portion of the crucible for accommodating the melted silicon in association with the cylindrical portion of the crucible, a wall thickness of the cylindrical member being not more than 3 mm, a rotational shaft for rotating the crucible, and a crucible support fixed to an upper end of the rotational shaft for supporting the crucible.
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