Extractor and deceleration lens for ion beam deposition apparatus
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United States of America Patent
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Mar 23, 1993
Grant Date -
N/A
app pub date -
Jul 30, 1991
filing date -
Jul 30, 1991
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A pair of lenses for an ion beam deposition device permit the formation of an ion beam with good beam characteristics and the variation of ion energy over an extremely wide range and at high perveance. An ion extractor is provided with a shield with a shape closely corresponding to the extraction electrode aperture to avoid sputtering and the introduction of contaminants into the material deposition process at low beam energies at the extractor. A three electrode deceleration lens allows high current beams to be decelerated to an energy of 25 eV for deposition, under some conditions. The combination of lenses allows the ion energy in the beam to be changed at particular regions along the beam so that optimal energies for focussing, mass analysis and deposition can be obtained.
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