Spin castable mixtures useful for making deep-UV contrast enhancement layers
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United States of America Patent
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Mar 23, 1993
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May 7, 1991
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Jul 31, 1987
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Abstract
Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.
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