Compact atomic force microscope
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United States of America Patent
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Mar 2, 1993
Issued Date -
N/A
app pub date -
Apr 19, 1991
filing date -
Nov 28, 1989
priority date (Note) -
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Abstract
This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for scanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.
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