Inspection method and apparatus
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United States of America Patent
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-
Feb 16, 1993
Grant Date -
N/A
app pub date -
Sep 11, 1991
filing date -
Sep 19, 1990
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An image of the inspected object, irradiated by a light, is picked by a video camera and a video signal therefrom is processed by an electronic processor. A pattern judging window is setup on the inspected object to thereby judge whether a pattern exists on the object, and when it is judged that there is no pattern a plurality of inspection windows are set up to thereby perform a predetermined defect inspection on portions of the inspected object within the plurality of windows. A pattern discrimination window is setup on the inspected object when it is judged that there exists a pattern so as to discriminate the kind of pattern, and either setting up the inspection window or another inspection window depending on the kind of pattern so discriminated.
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